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Micro-structuring of glassy carbon for precision glass molding of binary diffractive optical elements

Related publications (33)

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On the Limits of Precision Glass Molding for Diffractive Optical Elements

Karin Prater

Diffractive optical elements (DOEs) consist of surface reliefs with dimensions in the micrometer range and nanometer precision. Two technologies dominate: Elements replicated in plastic and directly microfabricated elements in fused silica. Plastic DOEs ar ...

EPFL2017

Near-field characterization of Bloch surface waves based 2D optical components

Richa Dubey

Bloch surface waves (BSWs) are surface electromagnetic modes that propagate at the interface between a multilayer substrate and a homogeneous external medium. The optical field of the surface mode is confined near the surface of the multilayer. This vertic ...

EPFL2017

Array imaging system for lithography

Toralf Scharf, Wilfried Noell, Raoul Kirner

We present an integrated array imaging system based on a stack of microlens arrays. The microlens arrays are manufactured by melting resist and reactive ion etching (RIE) technology on 8'' wafers (fused silica) and mounted by wafer-level packaging (WLP)(1) ...

Spie-Int Soc Optical Engineering2016

Precision glass molding of high-resolution diffractive optical elements

Hans Peter Herzig, Toralf Scharf, Karin Prater

The demand of high resolution diffractive optical elements (DOE) is growing. Smaller critical dimensions allow higher deflection angles and can fulfill more demanding requirements, which can only be met by using electron-beam lithography. Replication techn ...

Spie-Int Soc Optical Engineering2016

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A consumer market for diffractive optical elements in glass can only be created if high efficient elements are available at affordable prices. In diffractive optics the efficiency and optical properties increases with the number of levels used, but in the ...

Spie-Int Soc Optical Engineering2015

Multilevel Micro-Structuring of Glassy Carbon Molds for Precision Glass Molding

Hans Peter Herzig, Toralf Scharf, Karin Prater

Replication techniques for diffractive optical elements (DOEs) in soft materials such as plastic injection molding are state of the art. For precision glass molding in glasses with high transition temperatures, molds with extreme thermal resistivity, low c ...

Spie-Int Soc Optical Engineering2015

Surface micro-structuring of glassy carbon for precision glass molding of diffractive optical elements

Hans Peter Herzig, Toralf Scharf, Karin Prater

Glassy carbon is used nowadays for a variety of applications because of its mechanical strength, thermal stability and non-sticking adhesion properties. This makes it also a suitable candidate as mold material for precision compression molding of low and h ...

Spie-Int Soc Optical Engineering2014

Wafer-level micro-structuring of glassy carbon

Hans Peter Herzig, Toralf Scharf, Karin Prater, Loïc Etienne Hans, Cédric Kilchoer

Glassy carbon is used nowadays for a variety of applicationsbecause of its mechanical strength, thermal stability and non-sticking adhesion properties. One application is glass molding that allows to realize high resolution diffractive optical elements on ...

Spie-Int Soc Optical Engineering2014

On Micro Optical Elements for Efficient Light Diffusion

Roland Andreas Bitterli

Efficient light management is one of the key issues in modern energy conversion systems, be it to collect optical power or to redistribute light generated by high power light emitters. This thesis touches mainly on the subject of efficient light redistribu ...

EPFL2013

Opportunities in microstructured photonics

Hans Peter Herzig, Toralf Scharf, Tristan Sfez

The progress in novel light sources, detectors, materials and technology enable new opportunities and challenges for diffractive optics and nanoscale photonics. Important are also analysis tools, such as near-field imaging (SNOM). Only structures that can ...

EOS2010