Superplastic behavior of silica nanowires obtained by direct patterning of silsesquioxane-based precursors
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We report an all-dry, two-step, surface nanoengineering method to fabricate nanomechanical elements without photolithography. It is based on the local deposition through a nanostencil of a well-defined aluminum pattern onto a silicon/silicon-nitride substr ...
Two methods to fabricate artificial nanoscale mechanical devices are presented. One is based on the combination of local Ga+ doping of silicon by a focused ion beam and KOH etching. The second is based on the use of nanostencil as miniature shadow mask to ...
During nanoindentation measurements of thin films the formation of cracks within the film as well as of pile-up or sink-in around the indent are known to affect significantly the precision of hardness and Young's modulus values. The crack pattern in brittl ...
We present an automation technique for the growth of electron beam deposited tips on whole wafers of atomic force microscope cantilevers. This technique uses pattern recognition on scanning electron microscope images of successive magnifications to precise ...
In this paper we present our latest developments in high precision positioning and handling systems operating inside an SEM. The Laboratory in Scanning Electron Microscope concept (LAB-in-SEM) is proposed along with a description of our piezodriven manipul ...
This thesis describes measurements of the mechanical properties on the nanoscale. Three different mesoscopic tubular objects were studied: MoS2 nanotubes, carbon nanotubes and microtubules. The main goal was to investigate the interplay between the fine st ...
The objective of this paper is to present the fundamental phenomena occurring during the scribing and subsequent fracturing process usually performed when preparing surfaces of brittle semiconductors. In the first part, an overview of nano-scratching exper ...
The four-point probe is used for the measurement of the resistivity of thin metal or semiconductor films. There is an interest in miniaturization of the probes to obtain higher surface sensitivity, an increased spatial resolution and less damage to the sam ...
We investigated the application of two technologies for the fabrication of rectangular microchannels with reasonable path lengths for UV detection in UV transparent materials. The first approach uses inductively coupled plasma (ICP)-reactive ion etching (R ...
This paper describes a microgripper used for the micro-assembly of an artificial scaffold for tissue engineering. The porous sponge-like scaffold is a three dimensional construct built by tiny unit parts of biodegradable polymer. This application requires ...