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Micromechanical resonators with sub-micron gaps filled with high-k dielectrics
Related publications (114)
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Coupling of space-separated resonators is interesting for quantum and communication technologies. In this work, we show that antiferromagnetic resonance in separated parallel-plane slabs of hematite (alpha-Fe2O3) couple cooperatively to terahertz electroma ...
AMER PHYSICAL SOC2023Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression
Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Victor Plessky
This work presents the study of suspended Y-cut Lithium Niobate shear bulk acoustic resonators for wide band filter applications in the frequency range of 3.5-4.5GHz. The resonators consist of a Lithium Niobate film with Aluminum top interdigitated electro ...
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2023A 5G n77 Filter Using Shear Bulk Mode Resonator With Crystalline X-cut Lithium Niobate Films
This paper presents the use of a shear bulk acoustic mode resonator made of a membrane of X-cut lithium niobate (LiNbO3) for ultra-wide band filter applications. Aluminum interdigitated (IDT) electrodes are deposited on top of the LiNbO3 thin film as well ...
IEEE2023Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36 degrees-Cut Lithium Niobate
Luis Guillermo Villanueva Torrijo, Silvan Stettler
This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to the large e16 piezoelectric coefficient of YX36 degrees.-cut LNO, fabricated ...
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2023Fabrication of Suspended Piezoelectrically Transduced Resonators
The objective of this semester project is the fabrication of suspended piezoelectrically transduced resonators and to test and compare the quality of the piezoelectric layer using different processes and parameters. A functional fabrication process by lift ...
2023Development of Thin Film Lithium Niobate Shear Bulk Acoustic Wave Resonators
RF MEMS piezoelectric acoustic resonators are the essential building blocks for RF filters used in RF front-end modules for wireless mobile communication due to their compact size in the MHz-GHz frequency range, high Quality factors and large relative band ...
EPFL2022Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators
Luis Guillermo Villanueva Torrijo, Silvan Stettler
Thin-film lithium niobate (LNO) has been identified as a promising material platform for enabling high electromechanical coupling and low-loss piezoelectric resonators for filtering applications. In this work, the design and fabrication of fundamental shea ...
IEEE2022Ultra low quantum decoherence nano-optomechanical systems
Thermal motion of a room-temperature mechanical resonator typically dominates the quantum backaction of its position measurement. This is a longstanding barrier for exploring cavity optomechanics at room temperature. In order to enter the quantum regime of ...
EPFL20224-Port Microstrip planar resonator for multiband microwave material characterization applications
Planar microstrip resonators suitable for material characterization application are presented in this paper. The prototype consists of three resonators fed through four ports in a planar dielectric substrate without any additional resonators. The resonator ...
IEEE2022Development of Lamb wave resonators in thin film X-cut lithium niobate
Microelectromechanical systems (MEMS) is among the most revolutionary technologies of 21st century, with the applications ranging from industrial systems to consumer electronics. Using MEMS in battery-powered wireless devices has long been seen as the evol ...
EPFL2021