Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing

Emanuele Andrea Casu, Montserrat Fernandez-Bolanos Badia, Mihai Adrian Ionescu, Mariazel de la Candelas Maqueda López
2017
Conference paper

Official source

https://infoscience.epfl.ch/record/231236?ln=en

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