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We present for the first time nano-scale patterning of silk fibroin with a thermal scanning probe to locally convert water-insoluble crystalline silk into the water-soluble phase. Our first experiments demonstrate silk as a fully water-based resist for thermal scanning probe lithography with an achieved half-pitch resolution of 50.5±3 nm.
Ata Jedari Golparvar, Muhammad Umar
Jürgen Brugger, Xiao Sheng Zhang, Ya Wang, Peng Huang
Dominique Pioletti, Pierre-Etienne Bourban, Peyman Karami, Céline Samira Wyss, Adrien Julien Demongeot