Large Array of Shape Memory Polymer Actuators for Haptics and Microfluidics
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We present the microfabrication and characterisation of a ball valve micropump in glass, which is magnetically actuated using the sinusoidal current of an external electromagnet. We employ the use of a simple powder blasting technology for microstructuring ...
A disposable micropump is presented that uses the piston actuation principle and relies on the magnetic properties of a ferrofluid, a colloidal suspension of nanosize ferromagnetic particles. The cost effective micropump consists of 7 bonded layers of poly ...
In this paper, we have designed a bistable microelectromechanical switch for an implantable lead electrode multiplexer application. Fabrication is based on a single mask process. State changes require an 18 V pulse to the actuators consuming only 0.2 nJ en ...
This paper presents a simple and low-cost prototyping technology for the realization of integrated micropumps in polymethylmethacrylate (PMMA). The three-dimensional (3D) micropumps consist of stacks of structured PMMA layers, which are either realised wit ...