MOLYBDENUM DISULFIDE (MoS2) NANOELECTROMECHANICAL RESONATORS WITH ON-CHIP ALUMINUM NITRIDE (AlN) PIEZOELECTRIC EXCITATION

Luis Guillermo Villanueva Torrijo, Tom Larsen, Muhammad Faizan
2018
Conference paper

Official source

https://infoscience.epfl.ch/record/259417?ln=en

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