Jürgen Brugger, Giovanni Boero, Radivoje Popovic, Christian Santschi, Oscar Vazquez Mena, Schahrazede-Lila Mouaziz, Chantal Imboden
We report the fabrication and characterization of nickel Hall sensors integrated on SU-8 cantilevers. Sensors having active area down to 1x1 ...
Transducers ’072007