Modular interface and experimental setup for in-vacuum operation of microfluidic devices
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We introduce a new low-temperature (280 °C) parylene-to-SiO2 bonding process with high device yield (>90%) for the fabrication and integration of high-pressure-rated microfluidic chips. Pull tests demonstrate a parylene-to-SiO2 bonding strength of 10 ± 3 M ...
SU-8 photoresist is commonly used in the field of microfabrication as structural material or for molding of microfluidic devices. One major limitation, however, is the difficulty to process partially freestanding SU-8 structures or monolithic closed caviti ...
We present a novel image-based method to measure the on-chip microfluidic pressure and flow rate simultaneously by using the integrated optofluidic membrane interferometers (OMIs). The device was constructed with two layers of structured polydimethylsiloxa ...
Polymers like PDMS or SU-8 have become popular for microfluidic applications. We show that modifications of the surface energy are more stable on NOA81 compared to PDMS. A simple method to fabricate a closed all-polymer microfluidic channel showing both hy ...
We presented a pneumatically tunable 2 x 2 optofluidic switch for on-chip light routing that was controlled by compressed air. The device was fabricated with an optically clear elastomer-polydimethylsiloxane ( PDMS)-by soft-lithography. The optical switchi ...
Microdroplets are widely used in industrial processes. In the absence of external forces, droplets generally assume a spherical shape. Here, we present two methods to form non-spherical droplets in microfluidic glass chips. A uniformly hydrophobized chip h ...
We present an optofluidic chip with integrated polymer interferometers for measuring both the microfluidic air pressure and flow rate. The chip contains a microfluidic circuit and optical cavities on a polymer which was defined by soft lithography. The pre ...
This thesis aimed at developing new 3D structuration techniques for a relatively recent new ceramic technology called LTCC, which stands for Low Temperature, Co-fired Ceramic. It is a material originally developed for the microelectronic packaging industry ...
Quantitative biology requires quantitative data. No high-throughput technologies exist capable of obtaining several hundred independent kinetic binding measurements in a single experiment. We present an integrated microfluidic device (k-MITOMI) for the sim ...
We introduce for the first time the implementation of optofluidic lock-in spectroscopy of sub-nanoliter analyte on a microfluidic chip. Two methods, spatial modulation and pneumatic modulation with integrated optofluidic modulator, were demonstrated. (C) 2 ...
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