Mihai Adrian Ionescu, Daniel Grogg, Marco Mazza, Nicoleta-Diana Ciressan
The design, fabrication and experimental investigation of 21MHz MEM Bulk Lateral Resonators (BLR) on 1.5 mu m Silicon-On-Insulator (SOI) Fragmented Membranes with 100nm air-gaps are reported(#). Quality factors as high as 33'000 are measured under vacuum a ...
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2007