Publication

The Effect of Yttrium Addition on the Microstructures and Electrical Properties of CuMn Alloy Thin Films

Ho-Yun Lee
2019
Journal paper
Abstract

In this study, we fabricated thin-film resistors using CuMn and yttrium targets by DC/RF magnetron cosputtering. CuMnY-resistive thin films were deposited onto glass and Al2O3 substrates. The electrical properties and microstructures of CuMn alloy films with different yttrium content were investigated. The CuMnY films were annealed at temperature ranging from 250 degrees C to 350 degrees C in N-2 atmosphere. The phase variation, microstructure, film thickness, and constitutional analysis of CuMnY films were characterized using X-ray diffraction, field emission scanning, and high-resolution transmission electron microscopy and related energy dispersive X-ray analyses (XRD, FESEM, and HRTEM/EDX). It was found that CuMnY alloy films separated into two parts after annealing. The first part is the MnO phase on the bottom side of the film. The second part is an amorphous structure on the upper side of the film. The MnO phase is a microcrystalline that exists in CuMn films, which is dependent on the Y content and annealing temperature. CuMn alloy films with 15.7% yttrium addition annealed at 300 degrees C exhibited higher resistivity similar to 4000 mu omega-cm with -41 ppm/degrees C of temperature coefficient of resistance (TCR).

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Related concepts (32)
Yttrium
Yttrium is a chemical element with the symbol Y and atomic number 39. It is a silvery-metallic transition metal chemically similar to the lanthanides and has often been classified as a "rare-earth element". Yttrium is almost always found in combination with lanthanide elements in rare-earth minerals and is never found in nature as a free element. 89Y is the only stable isotope and the only isotope found in the Earth's crust. The most important present-day use of yttrium is as a component of phosphors, especially those used in LEDs.
Group 3 element
Group 3 is the first group of transition metals in the periodic table. This group is closely related to the rare-earth elements. It contains the four elements scandium (Sc), yttrium (Y), lutetium (Lu), and lawrencium (Lr). The group is also called the scandium group or scandium family after its lightest member. The chemistry of the group 3 elements is typical for early transition metals: they all essentially have only the group oxidation state of +3 as a major one, and like the preceding main-group metals are quite electropositive and have a less rich coordination chemistry.
Yttrium barium copper oxide
Yttrium barium copper oxide (YBCO) is a family of crystalline chemical compounds that display high-temperature superconductivity; it includes the first material ever discovered to become superconducting above the boiling point of liquid nitrogen (77 K) at about . Many YBCO compounds have the general formula YBa2Cu3O7−x (also known as Y123), although materials with other Y:Ba:Cu ratios exist, such as YBa2Cu4Oy (Y124) or Y2Ba4Cu7Oy (Y247). At present, there is no singularly recognised theory for high-temperature superconductivity.
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