Deposition of Thin Alumina Films Containing 3D Ordered Network of Nanopores on Porous Substrates
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Atomic layer deposition (ALD) is one of the premier methods to synthesize ultra-thin materials on complex surfaces. The technique allows for precise control of the thickness down to single atomic layers, while at the same time providing uniform coverage ev ...
Hoboken2024
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Sc-doped aluminum nitride (AlScN) allows for piezoelectric devices with large electromechanical coupling and the benefits increase with larger Sc doping in the film. However, with a larger Sc concentration, the process window narrows, and it is necessary t ...
2024
Coating nano particles and other substrates for efficiency enhancement, protection and obtaining new atomic structures is a widespread research topic in catalysis and material synthesis. Thus far, different approaches of coating, ranging from simplest to s ...
EPFL2023
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Stencil lithography (SL), which uses a perforated membrane as a reusable shadow mask to locally add material patterns on substrates provides a simple but versatile approach for the fabrication of functional devices on a large variety of substrate materials ...
WILEY2022
The synthesis and stress characterization of metal thin-films deposited on silicon wafers were performed on this project. Two different deposition techniques were employed: magnetron sputtering and Atomic Layer Deposition (ALD). Moreover, different tests w ...
2022
The growing needs for human healthcare have driven the development of wearable devices for monitoring the health status of an individual. Polymers represent a promising platform for such devices due to their ability to form an intimate contact between soft ...
EPFL2022
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The effectiveness of submerged synthetic aquatic vegetation on removal of colloids from flowing water was investigated to explore retention of particulate nonpoint source pollutants in aquatic systems. In colloid transport experiments, the deposition rate ...
2022
The goal of this project was to study if the fabrication of glass suspended microchannel resonators was possible. Through trial and error, the process parameters were determined, starting from the ideal dose in the dry etching process. The ideal size was d ...
2021
Continuous development of thin film deposition technologies is essential for the fabrication of films that meet the specific requirements of their target applications and working conditions. Therefore, it is necessary to increase the number of accessible a ...
EPFL2023
Hafnium Carbide (HfC) is a refractory ceramic known for its exceptional properties, making it suitable for a wide range of applications. This project investigates the potential utilization of HfC in Micro or Nano Electromechanical Systems (MEMS/NEMS) and e ...
