Publication

Development of Lamb wave resonators in thin film X-cut lithium niobate

Related publications (52)

Nanomechanical resonators with low dissipation for quantum optomechanics

Fields of technology as diverse as microwave filter construction, characterization of material interfaces with atomic precision, and detection of gravitational waves from astronomical sources employ mechanical resonators at their core. The utility of mecha ...

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Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Victor Plessky

This work presents the study of suspended Y-cut Lithium Niobate shear bulk acoustic resonators for wide band filter applications in the frequency range of 3.5-4.5GHz. The resonators consist of a Lithium Niobate film with Aluminum top interdigitated electro ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2023

Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36 degrees-Cut Lithium Niobate

Luis Guillermo Villanueva Torrijo, Silvan Stettler

This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to the large e16 piezoelectric coefficient of YX36 degrees.-cut LNO, fabricated ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2023

Development of Thin Film Lithium Niobate Shear Bulk Acoustic Wave Resonators

Soumya Yandrapalli

RF MEMS piezoelectric acoustic resonators are the essential building blocks for RF filters used in RF front-end modules for wireless mobile communication due to their compact size in the MHz-GHz frequency range, high Quality factors and large relative band ...

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Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators

Luis Guillermo Villanueva Torrijo, Silvan Stettler

Thin-film lithium niobate (LNO) has been identified as a promising material platform for enabling high electromechanical coupling and low-loss piezoelectric resonators for filtering applications. In this work, the design and fabrication of fundamental shea ...

IEEE2022

Low-Power and Wide-Tuning Range Frequency Generation for FMCW Radars in Advanced CMOS Technologies

Francesco Chicco

Nowadays, the internet of things (IoT) nodes have started to spread in various domains of our society, from the industrial to the domestic environment. The remote sensing is one among their fundamental functions. The implementation of a radio detection and ...

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Reference Oversampling PLL Achieving −256-dB FoM and −78-dBc Reference Spur

Kyojin Choo

This article presents a low jitter, low power, low reference spur LC oscillator-based reference oversampling digital phase locked loop (OSPLL). The proposed reference oversampling architecture simultaneously offers a low in-band phase noise, a wide-bandwid ...

IEEE2021

Fully Reconfigurable Coupled-Resonator Optical Waveguides (CROWs) with 10 nW Static Power MEMS

Niels Quack, Alain Yuji Takabayashi

We report on fully reconfigurable CROWs with MEMS-tunable waveguides. Resonatorto-resonator and resonator-to-waveguide coupling are fully tunable. Resonance of a resonator is also widely tunable to cover its full FSR. The static power consumption per tunab ...

IEEE2021

Evidence of Smaller 1/F Noise in AlScN-Based Oscillators Compared to AlN-Based Oscillators

Luis Guillermo Villanueva Torrijo, Marco Liffredo, Andrea Lozzi

In this paper we investigate the direct effect of resonator quality factor (Q) on the oscillator phase noise. We use 2-port contour mode resonators (CMRs), fabricated both with aluminum nitride (AlN) and aluminum scandium nitride (AlScN), as the frequency- ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2020

Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Luis Guillermo Villanueva Torrijo, Muhammad Faizan

In this paper, we demonstrate the fabrication and characterization of lithium niobate (LN) based Lamb wave mode (S0 and SH0) resonators that address the stringent requirements of RF filtering for modern communication systems. The devices consist of a 400 n ...

IOP PUBLISHING LTD2020

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