Semester Project on the balancing of coupled NEMS resonators by the application of voltage on a piezoelectric layer
Related publications (38)
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Bimorph structures are a standard method for transforming the high force of piezoelectric materials into a large deflection. In micro electromechanical systems (MEMS) applications, it is preferable to use structures consisting of a passive substrate (usual ...
A micro power generator harvesting vibration energy by resonant inertial oscillation of a piezoelectric laminated cantilever with proof mass was designed, fabricated, and characterized. The active part with 2 pm thick PZT on 5 mu m silicon was equipped wit ...
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The development of wireless and mobile communication in the last decade led to the elaboration of new components based on thin films with continually increasing performance and reduced fabrication cost. A fundamental element for mobile communication is the ...
The converse piezoelectric response of Pb(ZrxTi1−x)O3 ceramics is investigated as a function of material composition. The effects of the crystallographic phase and different dopants on piezoelectric nonlinearity are separately examined. For a linear depend ...
This paper focuses on the fabrication and evaluation of vibration energy harvesting devices by utilizing an epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin film. The high quality of the c-axis oriented PZT layer results in a high piezoelectric coefficient and a low ...
In this paper we report the fabrication and detailed electrical characterization of a novel test structure based on Metal-Ferroelectric-Metal-Oxide-Semiconductor transistor with internal metal contact, aiming at extracting the surface potential and the inv ...
Computational neuroscience is a branch of the neurosciences that attempts to elucidate the principles underlying the operation of neurons with the help of mathematical modeling. In contrast with a number of fields pursuing a tightly related goal, such as m ...
Integration of new functional materials into silicon microsystems is a key factor to enable technology for a wide range of innovative MEMS devices. Piezoelectric materials are of primary interest for integrating sensing and actuation functions in MEMS due ...
Cardiovascular diseases have a major impact in Western countries. Mathematical models and numerical simulations can help the understanding of physiological and pathological processes, complementing the information provided to medical doctors by medical ima ...
This paper reports on a device capable of electrical cell lysis and evaluation of lysis efficiency in continuous flow using dielectrophoretic cell sorting. The device uses an innovative design, called liquid electrodes, to perform both cell lysis and cell ...