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Silicon Nitride integrated photonic circuits have drawn much attention owing to its ultra-low loss and large Kerr nonlinearity. However, the lack of Pockels effect makes it difficult to be modulated clectro-optically, which posts a major challenge for the further development of Si3N4 circuits with advanced functions. The widely adopted thermo-optical tuning suffers from large power consumption and restricted speed (similar to 1 kHz). In this study, microwave frequency modulation (up to 9 GHz) of Si3N4 ring resonator is achieved by exciting bulk acoustic waves piezoelectrically, which modulates the microring via stress-optical effect. The acoustic waves are confined tightly in a released SiO2 thin film which enhances the acoustic energy density and thus modulation efficiency.
Tobias Kippenberg, Rui Ning Wang, Anat Siddharth, Andrey Voloshin, Viacheslav Snigirev, Andrea Bancora, Vladimir Shadymov
Camille Sophie Brès, Anton Stroganov, Boris Zabelich, Christian André Clément Lafforgue, Edgars Nitiss