Freeform Microstructuring of Cast Polymer-Derived Ceramics by Sacrificial Direct Laser Writing

Polymer-derived ceramics are known for their resistance to high temperatures and harsh environments as well as property tunability and compatibility with various shaping techniques. We demonstrate here a new hierarchical micro-manufacturing process combining the advantages of casting and direct laser writing. The parts’ general shape is defined by a reusable silicon mold whereas individual freeform microfeatures such as a micro QR-code are implemented through the addition of sacrificial photoresin microstructures. An organopolysilazane-based formulation is cast and thermally converted into SiCN. Resulting parts are fully dense, have the microstructure imprinted, and exhibit high mechanical strength and tunable electrical properties.