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Publication
Development of an encapsulation solution for suspended microchannel resonators
2021
Student project
Student project
Abstract
The goal of this project is to create a reliable process flow for the fabrication of a vacuum encapsulation for a resonator. This process shall be done in few steps and with standard processes from cleanroom. This encapsulation provides a wafer-level packaging for the sensor, which has multiple industrial benefits such as increasing yield and reliability and decreasing cost.
Official source
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