Publication

Development of an encapsulation solution for suspended microchannel resonators

2021
Student project

Abstract

The goal of this project is to create a reliable process flow for the fabrication of a vacuum encapsulation for a resonator. This process shall be done in few steps and with standard processes from cleanroom. This encapsulation provides a wafer-level packaging for the sensor, which has multiple industrial benefits such as increasing yield and reliability and decreasing cost.

Official source

https://infoscience.epfl.ch/record/293696?ln=en

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Development of an encapsulation solution for suspended microchannel resonators

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Technology and Planning: The Invalides Train Station Project in Paris (1889-1902)

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Technology and Planning: The Invalides Train Station Project in Paris (1889-1902)

Scala 3 syntax rewriting