**Are you an EPFL student looking for a semester project?**

Work with us on data science and visualisation projects, and deploy your project as an app on top of Graph Search.

Publication# Balanceable Coupled Piezoelectric NEMS Resonators

Abstract

This project aims at designing, fabricating and characterising balanceable coupled NEMS resonators, in order to verify a theoretical model. In the field of sensing, coupled NEMS resonators benefit from an immensely increased sensitivity towards changes in mass or in stiffness as compared to single resonators, but they are limited by the fabrication imprecisions, which may yield unbalanced resonators. As mode localisation is crucial to maximise the sensitivity, the fabricated resonators need to be balanceable, which is here to be achieved through the reverse piezoelectric effect, with the application of a direct voltage on one of the clamped-clamped beam resonators. While the mathematical model predicted a large tunability of the resonant frequencies per unit voltage, the fabricated resonators presented a smaller tunability. In fact, it has been discovered that the resonators are bending out of the plane to varying extents depending on the voltage that is applied for tuning, which partially invalidates the mathematical model by introducing a countereffect. Coupled resonators have nevertherless been able to be balanced, in spite of a weaker response to tuning.

Official source

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Related concepts (33)

Related MOOCs (2)

Related publications (44)

Resonator

A resonator is a device or system that exhibits resonance or resonant behavior. That is, it naturally oscillates with greater amplitude at some frequencies, called resonant frequencies, than at other frequencies. The oscillations in a resonator can be either electromagnetic or mechanical (including acoustic). Resonators are used to either generate waves of specific frequencies or to select specific frequencies from a signal. Musical instruments use acoustic resonators that produce sound waves of specific tones.

Mathematical model

A mathematical model is an abstract description of a concrete system using mathematical concepts and language. The process of developing a mathematical model is termed mathematical modeling. Mathematical models are used in applied mathematics and in the natural sciences (such as physics, biology, earth science, chemistry) and engineering disciplines (such as computer science, electrical engineering), as well as in non-physical systems such as the social sciences (such as economics, psychology, sociology, political science).

Tunable metamaterial

A tunable metamaterial is a metamaterial with a variable response to an incident electromagnetic wave. This includes remotely controlling how an incident electromagnetic wave (EM wave) interacts with a metamaterial. This translates into the capability to determine whether the EM wave is transmitted, reflected, or absorbed. In general, the lattice structure of the tunable metamaterial is adjustable in real time, making it possible to reconfigure a metamaterial device during operation.

Electrical Engineering I

Découvrez les circuits électriques linéaires. Apprenez à les maîtriser et à les résoudre, dans un premier temps en régime continu puis en régime alternatif.

Electrical Engineering I

Découvrez les circuits électriques linéaires. Apprenez à les maîtriser et à les résoudre, dans un premier temps en régime continu puis en régime alternatif.

vanishing viscosity, networks. This work has received funding from the Alexander von Humboldt-Professorship program, the Transregio 154 Project "Mathematical Modelling, Simulation and Optimization Using the Example of Gas Networks" of the DFG, the grant PI ...

Romain Christophe Rémy Fleury, Hervé Lissek, Stanislav Sergeev

Controlling audible sound requires inherently broadband and subwavelength acoustic solutions, which are to date, crucially missing. This includes current noise absorption methods, such as porous materials or acoustic resonators, which are typically ineffic ...

2023Luis Guillermo Villanueva Torrijo, Silvan Stettler

This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to the large e16 piezoelectric coefficient of YX36 degrees.-cut LNO, fabricated ...