Publication
Miniature silicon Michelson interferometer characterization for dimensional metrology
Related publications (28)
Yves Bellouard, Victor Carle Adrien Boureau, Ruben Ricca
Romain Christophe Rémy Fleury, Janez Rus
Camille Sophie Brès, Moritz Bartnick, Gayathri Bharathan
Yves Bellouard, Gözden Torun, Anastasia Romashkina
Philip Johannes Walter Moll, Chunyu Guo, Hao Yang
László Forró, Ferenc Simon, Bence Gábor Márkus, Sándor Kollarics