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We introduce powder blasting using a pressurised nozzle and a metallic mask as a new promising technology for microsystem fabrication. We study basic parameters of this powder blasting erosion process as well as mask-geometry effects on the erosion rate. W ...
A set of new technologies to fabricate microchannels using photosensitive polymer materials is presented. They are based on the use of polymers, hereafter called photopolymers, that are cured with UV light under a mask exposure. The basic material is ail e ...
We introduce two new low temperature bonding technologies for the assembly of microstructured glass substrates for the realisation of microchannels for miniaturised chemical analysis applications. A first method consists of a proper cleaning of the two gla ...
