Niobium nitride based thin films deposited by DC reactive magnetron sputtering
Graph Chatbot
Chat with Graph Search
Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.
DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.
The effect of nitrogen substoichiometry on the isostructural phase stabilities of the cubic Ti1-xAlxN1-y system has been investigated using first-principles calculations. The preferred isostructural decomposition pattern in these metastable solid solutions ...
In the quest of materials for the first wall of the future fusion reactor, it has been shown that oxide dispersion strengthened (ODS) ferritic / martensitic (F/M) steels appear to be promising candidates. The inherent good mechanical properties supported b ...
We investigate the presence of secondary phases in La-doped Bi-2201 thin films grown by laser ablation. The cation ratios in the target material, the oxygen pressure, and the substrate temperature during the deposition are the main parameters determining t ...
Properties of thin films such as the crystallinity of silicon deposited from SiH4 - H-2 discharges are governed by the plasma composition. Therefore, it is crucial to measure the plasma composition in order to understand and optimize the deposition rate, d ...
X-ray absorption near-edge structure (XANES) spectroscopy is applied to Zr-based alloys ((Zr, x%Nb) with x ⩽ 1 wt.%) corroded in steam at 415 °C to resolve the niobium speciation in the metal and the oxide parts of their metal/oxide interface. By combining ...
The era of scanning probe microscopy (SPM) started twenty years ago. A cut gold cantilever with a glued diamond stylus served as the scanning probe. Within a few years the crystalline silicon (Si) became the – up to today – predominant SPM probe material. ...
Laser annealing of shape memory alloy thin films provides new opportunities in actuator design and fabrication for microelectromechanical systems applications. In this paper, we present a three-dimensional thermal model to simulate the crystallization proc ...
A method for simplifying the analytical treatment of single phase systems is introduced. This method, called monophasor theory, makes it possible to apply the same calculation methods and control strategies used for three-phase systems. This way, the spaci ...
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2009
In the present work, we apply a 2D self consistent model of SiH4/H2 discharges in order to investigate the transition from microcrystalline to amorphous silicon growth. The model is used to examine the relative importance of ions and atomic hydrogen in the ...
