Publication
In this paper an innovative micromachined passive flow regulator for implantable drug delivery systems is presented. The aim is to passively achieve a constant flow rate over a certain pressure range through linear variation of a flow resistance. This flow regulator is based on bending membrane contact with a micromachined substrate. A first serie of samples has been realized using standard Silicon micromachining. For better biochemical performances, a second version of the device has been manufactured in Titanium using a combination of micromachining and conventional machining. Test results show a DI water flow regulation of 6 nanoliters per second over a pressure range between 100 mbar and 600 mbar.
Danick Briand, James Alec Pierce Bourely, Jaemin Kim, Xavier Aeby, Oleksandr Vorobyov
Aleksandra Radenovic, Andrey Chernev, Sanjin Marion, Michal Daniel Macha, Sebastian James Davis