Microspectrometer based on a tunable optical filter of porous silicon
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We present a MEMS infrared spectrometer for selective and quantitative chemical gas analysis. infrared absorption spectroscopy can distinguish gases easily and also detect nonreactive molecules like CO2, in contrast to e.g. metal oxide gas sensors The foll ...
We have designed and developed a new class of optical fiber components based on thin-film coatings and fiber gratings. In our design, the function of the thin-film fiber coating is to provide an electrical means to regulate the optical response of the fibe ...
We present a tunable interference filter for infrared and visible light that scans the desired part of the optical spectrum within milliseconds. A single pixel detector measures serially the intensity at selected wavelengths. This concept: avoids expensive ...
We present a far infrared gas spectrometer which uses a thin film pyroelectric detector integrated on silicon. The detector is in-house fabricated and consists of 1 x 50 elements of sol-gel deposited, zirconium rich lead titanate (PZT) which are suspended ...
We present a MEMS infrared spectrometer for selective and quantitative chemical gas analysis. It contains a tunable optical filter of porous silicon that allows to measure the infrared absorption of a gas mixture at different wavelengths serially with only ...