Publication

Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy

Nico de Rooij, Jürgen Brugger
1991
Journal paper

Abstract

A monocrystalline silicon lever with an integrated silicon tip for a Force/Friction Microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.

Official source

https://infoscience.epfl.ch/record/58445?ln=en

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Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy

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