Microlever with combined integrated sensor/actuator functions for scanning force microscopy
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We report on the first successful operation of a scanning force microscope using microfabricated capacitive force sensors. The sensors, which are made from single crystal silicon on insulator wafers, consist of a cantilever spring with integrated tip at th ...
We performed lateral force microscopy on thiolipid Langmuir-Blodgett (LB) films physisorbed on mica substrates with a silicon tip of an at. force microscope. The structure of condensed domains, reflecting their sym. morphol., was obsd. The lateral (frictio ...
In the present article we describe a new setup for an atomic force microscope in the beetle-type geometry. The microscope consists of a compact head standing on three piezo legs with a fourth central piezo carrying the cantilever tip. We use the laser beam ...
We have fabricated an xy-microstage with integrated protruding tip and electrostatic comb actuators for scanning probe surface imaging. This device, which is micromachined in monocrystalline silicon, nas been actuated and characterized and, for the first t ...
A simple method has been developed for the prodn. of Au surfaces which are uniformly flat over large areas. Si wafers serve as substrates for the evapn. of thin Au layers. A glass slide glued onto the Au film allows successful sepn. of the Au layer from th ...
Monocrystallme slhcon cantilevers with integrated silicon tips for scanning force mlcroscopy are fabriated by means of micromachining techniques Theoretical considerations including finite element modeling have been carried out in order to find a suitable ...
