AFM imaging with an xy-micropositioner with integrated tip
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Four-point probes (4PPs) are used for the resistivity measurement of thin metal or semiconductor films. There is an interest in miniaturization of 4PPs to obtain higher surface sensitivity, increased spatial resolution and less damage to the sample. Severa ...
We develop wear resistant, electrically conducting AFM probes. Here, we describe a new AFM probe made entirely out of tungsten (W). The fabrication involves microfabrication techniques such as surface moulding, thin-film structuring of tungsten and high as ...
Recently electrically conducting SPM probes were used as read/write sensor of magneto-resistive nanopillars and ferroelectric domains in the development of >1 Tb/inch2 data storage. Since metal coated (platinum (Pt) or Pt/iridium) silicon (Si) probes are n ...
The atomic force microscope (AFM) is limited in imaging speed by the bandwidth and dynamic behavior of the actuators and mechanical parts. For high-speed imaging all AFM components have to be optimized in performance. Here, we present improvements of the f ...
We present an automation technique for the growth of electron beam deposited tips on whole wafers of atomic force microscope cantilevers. This technique uses pattern recognition on scanning electron microscope images of successive magnifications to precise ...
SU-8 is a photoplastic polymer with a wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale t ...
We present the results of an exptl. and theor. study on the optimum design of shear-force sensors, used in scanning probe microscopes. We have optimized a configuration consisting of a tuning-fork/fiber-tip assembly, achieving quality factors (Q) exceeding ...
Due to the importance of scanning tunneling microscopy for atomic scale research the anomalously high corrugation values on close packed metal surfaces have been the subject of debate and extensive theoretical work in the past two decades. To date it remai ...
To improve the performance of atomic force microscopes regarding speed and noise sensitivity, it is important to consider the mechanical rigidity of the actuator (scanner), and the overall mechanical structure. Using finite element analysis in the design p ...
In the past, conducting AFM probes have been made by coating standard Si-cantilevers and tips with a thin film of e.g. tungsten (W). Here, we describe a new AFM probe made entirely out of tungsten. The fabrication involves microfabrication techniques such ...