Publication

NANOINGENEERING OF SIN MEMBRANES USING FIB

Jürgen Brugger, Christian Santschi, Marc Antonius Friedrich van den Boogaart, Nao Takano
2005
Report or working paper

Abstract

Applications of thin SixNy membranes may be found in miscellaneous fields such as MEMS and NEMS as well as biotechnology. FIB is an excellent tool in order to realize nano-structures on membranes achieving the ultimate limits and rapid prototyping.

Official source

https://infoscience.epfl.ch/record/78627?ln=en

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Graph Chatbot

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

NANOINGENEERING OF SIN MEMBRANES USING FIB

Graph Chatbot

Chat with Graph Search

Measurement of the K+ → π+γγ decay

Material removing tool and method for designing the same

A method

A method

Measurement of the K+ → π+γγ decay

Material removing tool and method for designing the same