Design and characterisation of low-cost thick-film piezoresistive force sensors for the 100 mN to 100 N range
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A novel probe based on a commercial quartz tuning fork and a microfabricated cantilever is presented. The U-shaped cantilever with a monolithic tip is combined with the tuning fork in a symmetrical arrangement, such that each of the two legs of the cantile ...
‘Real-time’ nanoscale imaging and single molecule force spectroscopy of bio-chemical specimen based on atomic force microscopy (AFM) requires cantilevers with both low force constant and high-resonant frequency. The required spring constant should be betwe ...
Vertical Hall sensors are capable of measuring surface-parallel components of the magnetic field. They allow therefore relatively easy conception of single-chip multi-axial magnetic sensors compared to solutions using horizontal Hall plates. The modern tre ...
We report the design, fabrication and test of piezoresistive cantilevers for intermolecular force detection in biochemical sensing. The small forces involved in molecular recognition experiments are best detected with cantilevers with small spring constant ...
We report the design, fabrication and test of piezoresistive cantilevers for intermolecular force detection in biochemical sensing. The small forces involved in molecular recognition experiments are best detected with cantilevers with small spring constant ...
We present an automation technique for the growth of electron beam deposited tips on whole wafers of atomic force microscope cantilevers. This technique uses pattern recognition on scanning electron microscope images of successive magnifications to precise ...
Surface chemical composition and topography of Pt-SnO2 thin films grown by radiofrequency (rf) reactive sputtering on two different Al2O3 substrates (rough and mechanically polished) were investigated by x-ray photoemission spectromicroscopy (XPSM) and ato ...
We report the development of piezoresistive cantilevers for intermolecular force detection in biochemical sensing, by using a commercial CMOS technology. The detection of the small forces involved in molecular recognition requires cantilevers with a small ...
We have built and operated a novel setup for the characterization and identification of gases or vapors based on sequential position readout via a beam-deflection technique from a microfabricated array of eight cantilever-type sensors. Each of the cantilev ...
Sequential position readout from a microfabricated array of eight cantilever-type sensors ~silicon technology! is demonstrated. In comparison with single sensors we find that mechanical disturbances from noise, such as from vibrations, turbulent gas flow, ...