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Data coding tools for color-coded vector nanolithography

Related publications (63)

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MAGNETIC NANOCRYSTAL MODIFIED EPOXY PHOTORESIST FOR MICROFABRICATION OF AFM PROBES

Jürgen Brugger, Cristina Martin Olmos

Nanocomposites based on an organic polymer and inorganic nanocrystals (NCs) represent a class of high impact functional materials able to convey the unique size and shape dependent properties of nano-objects to highly processable resists.[1] In this work, ...

2010

KINONE: a new software for the kinetic modelling of spectroscopic, calorimetric and concentration data

Julien Léo Billeter, Konrad Hungerbühler

On this poster, we present the new software Kinone dedicated to the kinetic modelling of spectroscopic, calorimetric and concentration data in homoge-neous liquid phase. Its capabilities will be demonstrated using some selected kinetic problems. K ...

2010

Silicon nanowire AFM tips grown on released scanning probe cantilevers from stencil-deposited catalysts

Jürgen Brugger, Andreea Veronica Savu

We present a parallel, full wafer technique for deposition of catalyst on released scanning probe bodies for the growth of individual high aspect-ratio Si nanowire tips. 1-D probes are necessary for imaging high aspect-ratio nano-patterns, such as deep and ...

2010

Nanoimprint lithography with UV-curable hyperbranched polymer nanocomposites

Yves Leterrier, Valérie Geiser

Nano-scale patterns were produced with UV-curable acrylated hyperbranched polymer nanocomposites using nanoimprint lithography with a glass master in a rapid, low-pressure process. The pattern of the glass master was replicated with composites containing u ...

Wiley-Blackwell2010

High robustness of correlation-based alignment with Penrose patterns to marker damage in electron beam lithography

Correlation-based alignment is an alternative alignment method for electron beam lithography. Using complex marker patterns, such as Penrose patterns, which contain more positional information, greater alignment accuracy can be achieved. Correlation-based ...

Elsevier2009

Method for deposition of a sensor on a conductive substrate

Gaëtan Marti, Cédric Rey

The process comprises the step of deposition of a sensor and of a part or of the entirety of a treatment unit on a not necessarily planar conductive surface by a soft lithography technique. ...

2008

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This paper describes the development and application of a new unique tool to support designers to optimise the sustainability of urban neighbourhoods (SUNtool). In this the paper introduces (i) the software architecture, (ii) the integrated solver and rela ...

2007

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Stencil lithography is used for patterning and connecting nanostructures with metallic microelectrodes in ultrahigh vacuum. Microelectrodes are fabricated by static stencil deposition through a thin silicon nitride membrane. Arbitrary nanoscale patterns ar ...

2007

Nanostenciling for combinatorial fabrications and interconnections of nanopatterns and microelectrodes

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Sébastien Gauthier

2007

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We have fabricated new and robust nanostencil membranes for the surface patterning of 100-nm scale Al wires on full wafer scale. The stencil membranes are mechanically reinforced with corrugations, making them more stable against accumulated stress. The ap ...

IEEE2007