Characterization of PZT thin films for micromotors
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The self-polarization effect is investigated in Pb(Zr,Ti)O-3 (PZT) thin films deposited by sol-gel and magnetron sputtering techniques. The effective piezoelectric coefficient of as-grown films, which is proportional to their initial polarization (self-pol ...
A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The materials figure of merit ...
For micromechanical applications, piezoelectric PbZrTO3 (PZT) thin films have been deposited on metallised Si3N4/SiO2 layers on Si wafers. Films with compositions near the morphotropic phase boundary (x=0.53) were prepared at 600°C using a multitarget, in- ...
A micro-pump for medical applications is being developed using organometallic derived PZT thin films and silicon micromachining technology. Critical issues include the deposition of 'thick' PZT films (1 to 2 mu m thickness), film processing compatibility w ...
Piezoelectric membranes consisting of PbZrxTi1-xO3 (PZT) films on silicon diaphragms have been fabricated, investigated, and applied for micromotors. The PZT films were deposited by sputtering and sol gel techniques. Resonance amplitudes of up to 1000 nm/V ...
The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems ar ...
The influence of ultraviolet (UV) illumination on piezoelectric properties is investigated in lead zirconate titanate (PZT) thin films. It is found that the poling procedure is more effective when the film is exposed to a broadband UV light in the presence ...
The piezoelectric response of silicon diaphragms covered with sputter-deposited PbZr0.45Ti0.55O3 (PZT) films has been investigated in view of their application in ultrasonic micro-actuators. The behaviour of resonance frequencies and quasistatic deflection ...
We have studied deposition by in-situ reactive sputtering of ferroelectric Pb(ZrxTi1-x)O3 (PZT) thin films on Pt and RuO2 electrodes, using temperatures in the 490-620°C range. Nucleation on the electrode was found to be of prime importance for the formati ...
Degradation of piezoelectric properties has been studied in ferroelectric PZT films by means of optical interferometry. The degradation under de bias and aging of poled films have been observed. The decay of piezoelectric coefficient with time is described ...