Nava Setter, Paul Muralt, Roland Luthier, Thomas Maeder
We fabricated and characterized a micromotor driven by a piezoelectric PZT (PbZrxTi1-xO3) thin films. Sputter and sol-gel techniques have been applied for the deposition of the PZT films onto a silicon stator membrane, which was 20 to 30 µm thick and had a ...
1995