Gas spectrometry based on a pyroelectric thin film array
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We report on a novel gas spectrometry technique using pyroelectric thin-him arrays. The 1 x 50 element arrays of PZT are integrated onto silicon using a membrane structure. The experimental characterization of the pyroelectric elements shows both high volt ...
Infrared (IR) absorption spectroscopy and mass spectrometry have been simultaneously applied to dusty radiofrequency (RF) plasmas in methane, acetylene and ethylene. The combination of IR absorption spectroscopy and mass spectrometry allows the chemical co ...
The absorbance signal in electrothermal at. absorption spectrometry is a result of the processes of atom formation and dissipation and 1st of all depends on the initial generation of atoms from the surface. The rising part of the absorbance time profiles c ...
The simulation and characterization of a low-cost IR source are described. The IR emission is obtained from heated thin film resistors which are either self- suspended or deposited an a membrane, The simulation, performed with a finite difference method, s ...
In situ Fourier transform infrared absorption spectroscopy has been used to study the composition of particles formed and suspended in radio-frequency discharges of silane-oxygen-argon gas mixtures. The silane gas constumption was observed by infrared abso ...
We demonstrate the implementation of a thin film pyroelectric array as a detector in an infrared gas spectrometer. The 1 x 50 element array is integrated onto a silicon chip with a sol-gel deposited zirconium modified lead titanate film (PZT) as the pyroel ...
Most ionic crystals have strong reflection bands in the far infrared. Many such crystals are also transmissive to infrared radiation. An unstable resonator that exploits these properties is described. Preliminary results from a device 134 cm long and of 6 ...
