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PZT thin films for microsensors and actuators: Where do we stand?

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Fabrication and characterization of micromachined accelerometers based on PZT thin films

Paul Muralt, Serge Hediger

In this paper the simple accelerometers based on PZT thin films were developed and characterized. The functions of seismic mass and spring are given by a boss loaded cantilever structure. The strain of the cantilever is detected by a Pb(Zr,Ti)O-3 thin film ...

1999

Ultrasonic flexural Lamb-wave actuators based on PZT thin film

Nico de Rooij, Nava Setter, Georges-André Racine

The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems ar ...

1998

Conducting barrier electrodes for direct contact of PZT thin films on tungsten

Nava Setter, Paul Muralt, Thomas Maeder

Two W protection schemes for direct-contact bottom electrodes for PZT thin films, namely RuO2/Cr and RuO2/Ru, were compared with respect to protective performance and contact resistance up to 800 degrees C annealing temperature in oxygen. Cr clearly offers ...

1998

Photoinduced poling of lead titanate zirconate thin films

Nava Setter

The influence of ultraviolet (UV) illumination on piezoelectric properties is investigated in lead zirconate titanate (PZT) thin films. It is found that the poling procedure is more effective when the film is exposed to a broadband UV light in the presence ...

1997

Piezoelectric thin films for MEMS

Paul Muralt

A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The materials figure of merit ...

1997

Germination et croissance de films minces de Pb(Zr, Ti)O3 sur silicium passivé et substrats métalliques

Thomas Maeder

We have studied deposition by in-situ reactive sputtering of ferroelectric Pb(ZrxTi1-x)O3 (PZT) thin films on Pt and RuO2 electrodes, using temperatures in the 490-620°C range. Nucleation on the electrode was found to be of prime importance for the formati ...

EPFL1997

PZT thin films for micro sensors and actuators

Paul Muralt

The paper reviews different aspects of deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for application in micromechanical systems. The deposition of such films and the principal processes for their integration onto silicon subst ...

1996

Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions

Paul Muralt, Thomas Maeder

The piezoelectric response of silicon diaphragms covered with sputter-deposited PbZr0.45Ti0.55O3 (PZT) films has been investigated in view of their application in ultrasonic micro-actuators. The behaviour of resonance frequencies and quasistatic deflection ...

Elsevier1996

Fatigue, Rejuvenation and Self-Restoring in Ferroelectric Thin-Films

Nava Setter, Alexander Tagantsev

The switching, fatigue and rejuvenation phenomena of ferroelectric PZT thin films with differently processed electrode-PZT interfaces and of different thicknesses have been investigated. The ferroelectric contribution to the switching parameters has been i ...

1995

PZT films for micro-pumps

Nava Setter, Dragan Damjanovic, Georges-André Racine

A micro-pump for medical applications is being developed using organometallic derived PZT thin films and silicon micromachining technology. Critical issues include the deposition of 'thick' PZT films (1 to 2 mu m thickness), film processing compatibility w ...

1995