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Ferroelectric thin films for micro-sensors and actuators: a review

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Photoinduced poling of lead titanate zirconate thin films

Nava Setter

The influence of ultraviolet (UV) illumination on piezoelectric properties is investigated in lead zirconate titanate (PZT) thin films. It is found that the poling procedure is more effective when the film is exposed to a broadband UV light in the presence ...

1997

Piezoelectric thin films for MEMS

Paul Muralt

A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The materials figure of merit ...

1997

Germination et croissance de films minces de Pb(Zr, Ti)O3 sur silicium passivé et substrats métalliques

Thomas Maeder

We have studied deposition by in-situ reactive sputtering of ferroelectric Pb(ZrxTi1-x)O3 (PZT) thin films on Pt and RuO2 electrodes, using temperatures in the 490-620°C range. Nucleation on the electrode was found to be of prime importance for the formati ...

EPFL1997

Thin film pyroelectric arrays as infra-red detectors

Paul Muralt, Andreas Seifert

Pyroelectric thin film 12-element linear arrays (element size 0.4x0.9 mm(2)) have been fabricated by standard photolithography techniques on silicon substrates. A voltage responsivity of almost 800 V/W in air and 3000 V/W in vacuum is measured at low frequ ...

1997

PZT thin films for micro sensors and actuators

Paul Muralt

The paper reviews different aspects of deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for application in micromechanical systems. The deposition of such films and the principal processes for their integration onto silicon subst ...

1996

Piezoelectric cantilever beams actuated by PZT sol-gel thin film

Nico de Rooij, Nava Setter, Philippe Renaud, Georges-André Racine

The mechanical response of piezoelectric cantilever beams actuated by sol-gel- derived lead zirconium titanate (PZT) thin film is reported. Small multilayered beams are used to analyse the converse piezoelectric effect and to measure the mechanical deflect ...

1996

Sol-gel deposition of PZT thin films on ceramic ZrO2 substrates

Nava Setter, Paul Muralt, Thomas Maeder

Pb(Zr1–xTix)O3 thin films (x = 0.55 and 0.85) were prepared on fine grained, polished ZrO2 ceramic substrates by a sol-gel method. The high thermal expansion of ZrO2 relative to Si allows the preparation of thicker PZT films with reduced thermal stress. Fo ...

IEEE1996

Fatigue, Rejuvenation and Self-Restoring in Ferroelectric Thin-Films

Nava Setter, Alexander Tagantsev

The switching, fatigue and rejuvenation phenomena of ferroelectric PZT thin films with differently processed electrode-PZT interfaces and of different thicknesses have been investigated. The ferroelectric contribution to the switching parameters has been i ...

1995

PZT films for micro-pumps

Nava Setter, Dragan Damjanovic, Georges-André Racine

A micro-pump for medical applications is being developed using organometallic derived PZT thin films and silicon micromachining technology. Critical issues include the deposition of 'thick' PZT films (1 to 2 mu m thickness), film processing compatibility w ...

1995

Micromachined PZT thin film actuators for micromotors

Nava Setter, Paul Muralt, Roland Luthier, Thomas Maeder

We fabricated and characterized a micromotor driven by a piezoelectric PZT (PbZrxTi1-xO3) thin films. Sputter and sol-gel techniques have been applied for the deposition of the PZT films onto a silicon stator membrane, which was 20 to 30 µm thick and had a ...

1995