Publication
Effect of filler behavior on nanocomposite SU8 photoresist for moving micro- parts
Abstract
The use of low-stress SU8 nanocomposites as a functional material for micro- parts and coating applications is described in this paper. It was found that the nanoparticles lower the internal stress and decrease the wear rate and frictional coefficient of the SU8 epoxy. The applicability of this technology is demonstrated on gear wheels configuration and coating multilayer capping technology on moving micro-parts
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A nanoparticle or ultrafine particle is usually defined as a particle of matter that is between 1 and 100 nanometres (nm) in diameter. The term is sometimes used for larger particles, up to 500 nm, or fibers and tubes that are less than 100 nm in only two directions. At the lowest range, metal particles smaller than 1 nm are usually called atom clusters instead.
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A gear is a rotating circular machine part having cut teeth or, in the case of a cogwheel or gearwheel, inserted teeth (called cogs), which mesh with another (compatible) toothed part to transmit (convert) torque and speed. The basic principle behind the operation of gears is analogous to the basic principle of levers. A gear may also be known informally as a cog. Geared devices can change the speed, torque, and direction of a power source.
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