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MEMS-based nanopatterning: new challenges and opportunities for Materials Science
Related publications (58)
Sub-20nm gaps in HSQ for ultra-scaled nanoelectronic devices
Maneesha Rupakula, Wolfgang Amadeus Vitale
We build sub-20 nm gaps in hydrogen silsesquioxane (HSQ) by electron beam lithography, to enable nano-template structures for selective epitaxial growth of Ge or III-V semiconductors for ultra-scaled electronic applications [1]. Gaps of this order have bee ...
2016On stoichiometry and intermixing at the spinel/perovskite interface in CoFe2O4/BaTiO3 thin films
Vasiliki Tileli, Martial Duchamp
The performance of complex oxide heterostructures depends primarily on the interfacial coupling of the two component structures. This interface character inherently varies with the synthesis method and conditions used since even small composition variation ...
2014Low-NA focused vortex beam lithography for below 100-nm feature size at 405 nm illumination
Hans Peter Herzig, Toralf Scharf, Myun Sik Kim
There are varieties of novel methods, which demonstrate the super-resolution. For instance, an optically trapped sub-micron dielectric sphere serves as a near-field focusing lens to directly write patterns of ~100 nm in liquid, and accelerated metallic nan ...
Spie-Int Soc Optical Engineering2013Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning
Nico de Rooij, Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Cristina Martin Olmos, Peter Van der Wal
Processing fl exibility and good mechanical properties are the two major reasons for SU-8 extensive applicability in the micro-fabrication of devices. In order to expand its usability down to the nanoscale, conductivity of ultra-thin SU-8 layers as well as ...
Wiley-Blackwell2012Biomimetic soft lithography on curved nanostructured surfaces
Jürgen Brugger, Thomas Kiefer, Valentin Flauraud, Vaida Auzelyte
In this paper a nano-molding process using a nature-created master is demonstrated. The eye of night moth Agotis exclamationis having 100 nm-scale structures on a curved surface is used as biomimetic master mold from which nanostructures are replicated ont ...
Elsevier2012Reusable Nanostencils for Creating Multiple Biofunctional Molecular Nanopatterns on Polymer Substrate
Hatice Altug, Serap Aksu, Min Huang
In this paper, we demonstrate a novel method for high throughput patterning of bioprobes with nanoscale features on biocompatible polymer substrate. Our technique, based on nanostencil lithography, employs high resolution and robust masks integrated with a ...
2012Advances in Nanostenciling: resistless nanopatterning enables new applications
Jürgen Brugger, Andreea Veronica Savu
This paper presents the state-of-the-art of nanostencil as a direct and local patterning method. Stencil lithography is a high-resolution shadow mask technique that allows structuring surfaces without using the harsh process steps typically associated with ...
2011Biomimetic soft lithography on curved nanostructured surfaces
Jürgen Brugger, Thomas Kiefer, Valentin Flauraud, Vaida Auzelyte
In this paper a nano-molding process using a nature-created master is demonstrated. The eye of night moth Agotis Exclamationis having 100 nm-scale structures on a curved surface is used as biomimetic master mold from which nanostructures are replicated ont ...
Elsevier Science Bv2011Silicon nanowire AFM tips grown on released scanning probe cantilevers from stencil-deposited catalysts
Jürgen Brugger, Andreea Veronica Savu
We present a parallel, full wafer technique for deposition of catalyst on released scanning probe bodies for the growth of individual high aspect-ratio Si nanowire tips. 1-D probes are necessary for imaging high aspect-ratio nano-patterns, such as deep and ...
2010Nano-Bio-Technology and Sensing Chips: New Systems for Detection in Personalized Therapies and Cell Biology
Further advances in molecular medicine and cell biology also require new electrochemical systems to detect disease biomarkers and therapeutic compounds. Microelectronic technology offers powerful circuits and systems to develop innovative and miniaturized ...
2010