MEMS-based nanopatterning: new challenges and opportunities for Materials Science
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In this paper a nano-molding process using a nature-created master is demonstrated. The eye of night moth Agotis Exclamationis having 100 nm-scale structures on a curved surface is used as biomimetic master mold from which nanostructures are replicated ont ...
We present a parallel, full wafer technique for deposition of catalyst on released scanning probe bodies for the growth of individual high aspect-ratio Si nanowire tips. 1-D probes are necessary for imaging high aspect-ratio nano-patterns, such as deep and ...
The performance of complex oxide heterostructures depends primarily on the interfacial coupling of the two component structures. This interface character inherently varies with the synthesis method and conditions used since even small composition variation ...
2014
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In this paper, we demonstrate a novel method for high throughput patterning of bioprobes with nanoscale features on biocompatible polymer substrate. Our technique, based on nanostencil lithography, employs high resolution and robust masks integrated with a ...
2012
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This paper presents the state-of-the-art of nanostencil as a direct and local patterning method. Stencil lithography is a high-resolution shadow mask technique that allows structuring surfaces without using the harsh process steps typically associated with ...
2011
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Processing fl exibility and good mechanical properties are the two major reasons for SU-8 extensive applicability in the micro-fabrication of devices. In order to expand its usability down to the nanoscale, conductivity of ultra-thin SU-8 layers as well as ...
Wiley-Blackwell2012
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In this paper a nano-molding process using a nature-created master is demonstrated. The eye of night moth Agotis exclamationis having 100 nm-scale structures on a curved surface is used as biomimetic master mold from which nanostructures are replicated ont ...
Elsevier2012
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There are varieties of novel methods, which demonstrate the super-resolution. For instance, an optically trapped sub-micron dielectric sphere serves as a near-field focusing lens to directly write patterns of ~100 nm in liquid, and accelerated metallic nan ...
Spie-Int Soc Optical Engineering2013
Further advances in molecular medicine and cell biology also require new electrochemical systems to detect disease biomarkers and therapeutic compounds. Microelectronic technology offers powerful circuits and systems to develop innovative and miniaturized ...
2010
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We build sub-20 nm gaps in hydrogen silsesquioxane (HSQ) by electron beam lithography, to enable nano-template structures for selective epitaxial growth of Ge or III-V semiconductors for ultra-scaled electronic applications [1]. Gaps of this order have bee ...