Publication
We demonstrate dissipation dilution engineering techniques for ultralow dissipation mechanical resonators. The Si3N4 nanobeams show quality factors (Q) as high as 800 million and Q x f exceeding 10(15) Hz-both records at room temperature. (C) 2019 The Author(s)
Tobias Kippenberg, Alberto Beccari, Nils Johan Engelsen, Guanhao Huang
Thomas Keller, Lulu Liu, Abdolvahid Movahedirad
Tobias Kippenberg, Alberto Beccari, Nils Johan Engelsen