Publication
In this work we demonstrate the advantages of investigating diffractive optical elements in the phase domain. In this regime we can detect features that are not restrained by the diffraction limit and relate them to the geometrical and optical properties of the sample under test. To accomplish that, we use the custom made spectral high resolution interference microscope. Phase map recordings allow for easier and more precise localization of the positions, where phase changes happen. We show the localization capabilities by detecting phase singularities created by a trench. We also apply the concept to abrupt phase jumps of a phase diffractive component and determine the achievable resolution.