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Optimizing Atomic Layer Deposition Processes with Nanowire-Assisted TEM Analysis
Related publications (31)
Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes
Luis Guillermo Villanueva Torrijo, Silvan Stettler, Marco Liffredo, Nan Xu, Federico Peretti
Sc-doped aluminum nitride (AlScN) allows for piezoelectric devices with large electromechanical coupling and the benefits increase with larger Sc doping in the film. However, with a larger Sc concentration, the process window narrows, and it is necessary t ...
2024