Catégorie
Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface. Plasma processing techniques include: Plasma activation Plasma ashing Plasma cleaning Plasma electrolytic oxidation Plasma etching Plasma functionalization Plasma polymerization Corona treatment Plasma modification Related topics are plasma chemistry, chemical vapor deposition, and physical vapor deposition processes like sputter deposition, plasma iondoping, vacuum plasmaspraying, and reactive ion etching.
Olivier Sauter, Roland Behn, Igor Klimanov, Petri Nikkola
Ambrogio Fasoli, Ivo Furno, Paolo Ricci, Benoît Labit, Christian Gabriel Theiler, Nicola Vianello, Davoud Iraji