MICRO-331: Microfabrication technologiesThe student will learn process techniques and applications of modern micro- and nanofabrication, as practiced in a clean room, with a focus on silicon, but also multi-material microsystems and flexibl
MICRO-530: NanotechnologyThis course gives the basics for understanding nanotechnology from an engineer's perspective: physical background, materials aspects and scaling laws, fabrication and imaging of nanoscale devices.
MICRO-501: MEMS practicals IObjective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class
MICRO-621: MOOC: Micro and Nanofabrication (MEMS)Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC
MICRO-605: Optical MEMS and micro-opticsMicro-optics and optical MEMS encompass a wide range of methods, devices and systems that enable precise, high-speed manipulation of light at the wavelength scale. MICRO605 provides a comprehensive i
MICRO-534: Advanced MEMS & microsystemsIn depth analysis of the operation principles and technology of advanced micro- and nanosystems. Familiarisation to their implementation into products and their applications.
