Concept
Microlithography
Cours associés (11)
MICRO-332: Microfabrication practicals
The goal of this course is to introduce students to the practical aspects of some basic micro-fabrication techniques.
MICRO-530: Nanotechnology
This course gives the basics for understanding nanotechnology from an engineer's perspective: physical background, materials aspects and scaling laws, fabrication and imaging of nanoscale devices.
MICRO-501: MEMS practicals I
Objective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class
MICRO-431: Materials and technology of microfabrication
The student will learn procedures and applications of modern microfabrication technologies, as practiced in a clean room environment, in particular modern techniques that go beyond the classical steps
MICRO-724: Advanced topics in micro- and nanomanufacturing: top-down meets bottom-up
This course introduces advanced fabrication methods enabling the manufacturing of novel micro- and nanosystems (NEMS/MEMS). Both top-down techniques (lithography, stenciling, scanning probes, additive
MICRO-605: Optical MEMS and micro-optics
Micro-optics and optical MEMS encompass a wide range of methods, devices and systems that enable precise, high-speed manipulation of light at the wavelength scale. MICRO605 provides a comprehensive i
MICRO-621: MOOC: Micro and Nanofabrication (MEMS)
Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC
MICRO-618: Soft Microsystems Processing and Devices
Amongst others, following topics will be covered during the course:
- Soft Microsystems and Electronics
- Electroactive polymers
- Printed electronics and microsystems
- Inkjet printing of polymers
MICRO-470: Scaling laws in micro & nanosystems
This class adresses scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation
MICRO-332(a): Manufacturing DLLs (automne)
The goal of this DLL is to introduce students to both the practical aspects of micro-fabrication of a fully functional device.