Publications associées à Masque à gaz

High aspect ratio etching of nanopores in PECVD SiC through AAO mask

Jürgen Brugger, Songmei Wu, Vaida Auzelyte, Wei Tang

We present in this work the fabrication of high aspect ratio nanopores in 500 nm PECVD SiC films through AAO (anodic aluminum oxide) mask. The initial AAO thin film is 180 nm thick and the diameter of nanopores is 33 ± 7 nm. We have used three plasma chemi ...

IEEE2013

Planar micro-direct methanol fuel cell prototyped by rapid powder blasting

Martinus Gijs, Meng Shen, Ludovic Dovat

We present a planar micro-direct methanol fuel cell (μ−DMFC) fabricated by rapid prototyping powder blasting technology. Using an elastomeric mask, we pattern two parallel microfluidic channels in glass. The anode and cathode of the fuel cell are formed by ...

Elsevier2011

Fabrication of microfluidic mixers with varying topography in glass using the powder blasting process

Martinus Gijs, Abdeljalil Sayah, Virendra Kumar Parashar

The powder-blasting method is used to fabricate structures with a three-dimensional topography in glass using elastomeric masks. The relation between the mask opening width and the erosion depth is exploited to fabricate microstructures with varying depth ...

2009

Gas assisted focused electron beam induced etching of alumina

Patrik Willi Hoffmann, Tristan Bret, Bamdad Afra

This study investigates focused electron beam induced etching for the removal of alumina particles on patterned extreme ultra violet (EUV) mask using nitrosyl chloride (NOCl) as assist gas. As potential contaminant, particles of aluminum oxide (alumina, Al ...

2009

What is the strength of a mask in visual metacontrast masking?

Michael Herzog, Gregory Francis

After more than a century of research, the mechanisms underlying visual masking are still hotly debated. One key characteristic of masking is that variations in the stimulus onset asynchrony (SOA) between the target and the mask can lead to either monotoni ...

Association for Research in Vision and Ophthalmology2007