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The era of scanning probe microscopy (SPM) started twenty years ago. A cut gold cantilever with a glued diamond stylus served as the scanning probe. Within a few years the crystalline silicon (Si) became the – up to today – predominant SPM probe material. ...
Scanning probe microscopy has become, nowadays, a branch of microscopy widely used to image surfaces of different specimens. Among the various applications, the magnetic imaging is one of the most exciting scanning probe microscopy techniques. It allows th ...
The operation of the scanning near-field optical microscope based on the double-resonant montage of a fiber probe onto the tuning fork (working frequency of the latter, that is 32 kHz, coincides with the second resonance frequency of the bending oscillatio ...
SPIE-INT SOC OPTICAL ENGINEERING, PO BOX 10, BELLINGHAM, WA 98227-0010 USA2007
We report on the fabrication of atomic force microscopy (AFM) probes using a novel technology that performs every machining step by means of one single deep reactive ion etching (DRIE) equipment. Specific etching conditions are optimized in order to define ...
Process optimization and properties of lead zirconate titanate (PZT) films for piezoelectric micromachined ultrasonic transducers (pMUTs) for scanning probe devices will be presented. The goal of the work was a replacement of the tetragenic and mutagenic s ...
The rapid development of molecular biology is creating a pressing need for arrays of biomolecules that are able to detect smaller and smaller volumes of analytes. This goal can be achieved by shrinking the average size and spacing of the arrays constituent ...
In this paper we present the fabrication and characterization of highly sensitive cantilevers, with and without magnetic tip, used for magnetic resonance force microscopy experiments. The full wafer silicon batch microfabrication was successful and the ach ...
This thesis comes within the scope of tribology studies at the nanometer scale. The experimental techniques used in this work are essentially related to atomic force microscopy, which gives a direct access to the topography and forces of the studied system ...
A concept of an array actuator that is used to control the tip-sample separation of cantilevers in a two-dimensional (2D) probe array scanning system is proposed in this article. The feasibility of the concept is demonstrated with a 10 × 10 array actuator ...
A method of analyzing a sample with a probe based measurement instrument using stiffness tomography. Stiffness or elastic modulus data obtained through contact measurement with the sample as a function of depth is used in the detection of features, particu ...