Concept

Accéléromètre

Publications associées (243)

Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica

We present a novel optical sensor concept that merges integrated optics and micro-mechanics in a monolithic substrate. This concept pushes microsystems integration and defines a new class of monolithic optical microsystems where only optical signals are pr ...

Optical Society of America2005

Pedestrian navigation method and apparatus operative in a dead reckoning mode

Quentin Ladetto

A displacement of a pedestrian is determined from his or her accelerations by detecting accelerations which is substantially non vertical, determining a characteristic feature in the detected accelerations correlated with a step frequency, determining the ...

2004

Three axis active magnetic levitation for inertial sensing systems

Roland Moser, François Barrot, Alexis Boletis

The invention relates to an inertial sensor based on the magnetic levitation of an inertial mass comprising an active magnetic bearing unit arranged in such a way as to levitate the inertial mass and characterized by the fact that it furthermore comprises ...

2004

Diamagnetic levitation system

Roland Moser, François Barrot

The invention concerns an inertial sensor or an actuator based on diamagnetic levitation, said inertial sensor or actuator comprising support means serving as main support body for an inertial sensor or for an actuator, a two dimensional array of permanent ...

2004

Submicron piezoresistive cantilevers in a CMOS-compatible technology for intermolecular force detection

Luis Guillermo Villanueva Torrijo

We report the design, fabrication and test of piezoresistive cantilevers for intermolecular force detection in biochemical sensing. The small forces involved in molecular recognition experiments are best detected with cantilevers with small spring constant ...

2004

Submicron piezoresistive cantilevers in a CMOS-compatible technology for intermolecular force detection

Luis Guillermo Villanueva Torrijo

2004

Capteurs et algorithmes pour la localisation autonome en mode pédestre

Quentin Ladetto

The challenge of knowing one's position in a precise and reliable way, at any time, with and without reception of satellite signals, represents an area fairly explored for the navigation of vehicles. To widen this service to the pedestrians requires a diff ...

EPFL2003

Self-sensing and self-actuating probe based on quartz tuning fork combined with microfabricated cantilever for dynamic mode atomic force microscopy

Nico de Rooij, Terunobu Akiyama

A novel probe based on a commercial quartz tuning fork and a microfabricated cantilever is presented. The U-shaped cantilever with a monolithic tip is combined with the tuning fork in a symmetrical arrangement, such that each of the two legs of the cantile ...

2003

Integrated sensors for PZT actuators based on thick-film resistors

Peter Ryser, Thomas Maeder, Jean-Marc Breguet, Arvid Bergander

Abstract—A common problem when using piezoceramic actuators for precise positioning is their hysteresis. Either external sensors such as capacitive or inductive probes, optical sensors or strain gauges are commonly used. The latter are the most favorable s ...

IEEE2002

Piezoelectric cantilever microphone for photoacoustic GAS detector

Nava Setter, Paul Muralt, Stéphane Hiboux, Andreas Seifert, Nicolas Ledermann

New micromachined pressure sensors based on PZT coated silicon cantilevers have been fabricated and integrated in a photoacoustic gas detector. PZT Sol-gel thin films texture and composition were optimized with respect to the transverse piezoelectric coeff ...

2001

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