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Semiconductor fabrication plant

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Demetri Psaltis

Andreea Veronica Savu

Anna Fontcuberta i Morral

2014 Associate Professor at the Institut des Matériaux, EPFL 2008 Assistant Professor Tenure Track at the Institut des Matériaux, EPFL 2009 Habilitation in Physics, Technische Universität München 2005-2010 Marie Curie Excellence Grant Team Leader at Walter Schottky Institut, Technische Universität München, on leave from Centre National de la Recherche Scientifique (CNRS, France) 2004-2005 Visiting Scientist at the California Institute of Technology, on leave from CNRS; Senior Scientist and co-founder of Aonex Technologies (a startup company for large area layer transfer of InP and Ge on foreign substrates for the main application of multi-junction solar cells) 2003 Permanent Research Fellow at CNRS, Ecole Polytechnique, France 2001-2002 Postdoctoral Scholar at the California Institute of Technology Study of wafer bonding and hydrogen-induced exfoliation processes for integration of mismatched materials in views of photovoltaic applications Sponsor: Professor Harry A. Atwater 1998-2001 PhD in Materials Science, Ecole Polytechnique Study of polymorphous silicon: growth mechanisms, optical and structural properties. Application to Solar Cells and Thin Film Transistors Advisor: Pere Roca i Cabarrocas 1997-1998 Diplôme dEtudes Approfondis (D.E.A.) in Materials Science at Université Paris XI, France . 1993-1997 BA in Physics at Universitat de Barcelona

Davide Sacchetto

Olivier Martin

Olivier J.F. Martin a obtenu le diplôme (M.Sc.) et le doctorat en physique de l'Ecole Polytechnique Fédérale de Lausanne (EPFL) en 1989, respectivement 1994. En 1989 il a rejoint le laboratoire de recherche d'IBM à Rüschlikon près de Zurich, où il a étudié les propriétés optiques et thermiques des lasers semiconducteur. Entre 1994 et 1997 il était collaborateur scientifique de l'Ecole Polytechnique Fédérale de Zurich (ETHZ). En 1997 il a reçu une bourse Profil du Fonds National Suisse de la Recherche Scientifique (FNSRS) lui permettant de mettre sur pied un groupe de recherche indépendant. Entre 1996 et 1999, Olivier Martin a passé plus d'une année et demi aux U.S.A. comme collaborateur invité de l'Université de Californie à San Diego. En 2001 il a reçu une bourse de professeur assistant du FNSRS et devint professeur de Nano-optique à l'ETHZ. En 2003 il a été nommé professeur de nanophotonique et de traitement optique du signal à l'EPFL où il dirige actuellement le laboratoire de Nanophotonique & Métrologie.

Tobias Kippenberg

Tobias J. Kippenberg is Full Professor of Physics at EPFL and leads the Laboratory of Photonics and Quantum Measurement. He obtained his BA at the RWTH Aachen, and MA and PhD at the California Institute of Technology (Caltech in Pasadena, USA). From 2005- 2009 he lead an Independent Research Group at the MPI of Quantum Optics, and is at EPFL since. His research interest are the Science and Applications of ultra high Q microcavities; in particular with his research group he discovered chip-scale Kerr frequency comb generation (Nature 2007, Science 2011) and observed radiation pressure backaction effects in microresonators that now developed into the field of cavity optomechanics (Science 2008). Tobias Kippenberg is alumni of the “Studienstiftung des Deutschen Volkes”. For his invention of “chip-scale frequency combs” he received he Helmholtz Price for Metrology (2009) and the EFTF Young Investigator Award (2010). For his research on cavity optomechanics, he received the EPS Fresnel Prize (2009). In addition he is recipient of the ICO Prize in Optics (2014), the Swiss National Latsis award (2015), the German Wilhelm Klung Award (2015) and ZEISS Research Award (2018). He is fellow of the APS and OSA, and listed since 2014 in the Thomas Reuters highlycited.com in the domain of Physics. EDUCATION 2009: Habilitation (Venia Legendi) in Physics, Ludwig-Maximilians-Universität München 2004: PhD, California Institute of Technology (Advisor Professor Kerry Vahala) 2000: Master of Science (Applied Physics), California Institute of Technology 1998: BA in Physics, Technical University of Aachen (RWTH), Germany 1998: BA in Electrical Engineering, Technical University of Aachen (RWTH), Germany ACADEMIC POSITIONS 2013 - present: Full Professor EPFL 2010 - 2012: Associate Professor EPFL 2008 - 2010: Tenure Track Assistant Professor, Ecole Polytechnique Federale de Lausanne 2007 - present: Marie Curie Excellent Grant Team Leader, Max Planck Institute of Quantum Optics (Division of Prof.T.W. Hänsch) 2005 - present: Leader of an Independent Junior Research Group, Max Planck Institute 2005- present: Habilitant (Prof. Hänsch) Ludwig-Maximilians-Universität (LMU) 2005-2006: Postdoctoral Scholar, Center for the Physics of Information, California Institute of Technology 2000-2004: Graduate Research Assistant, California Institute of Technology PRIZES AND HONORS: ZEISS Research Award 2018 Fellow of the APS 2016 Klung-Wilhelmy Prize 2015 Swiss Latsis Prize 2014 Selected Thomson Reuters Highly Cited Researcher in Physics, 2014/2015 ICO Prize, 2013 EFTF Young Scientist Award (for "invention of microresonator based frequency combs") 2010 Fresnel Prize of the European Physical Society (for contributions to Optomechanics) 2009 Helmholtz Prize for Metrology (for invention of the monolithic frequency comb) 2009 1st Prize winner of the EU Contest for Young Scientists, Helsinki, Finland. Sept. 1996 Jugend forscht 1st Physics Prize at the German National Science Contest May 1996 FELLOWSHIPS Fellow of the German National Merit Foundation ("Studienstiftung des Deutschen Volkes") 1998-2002 Member of the Daimler-Chysler-Fellowship-Organization 1998-2002 Dr. Ulderup Fellowship 1999-2000 RESEARCH INTERESTS Experimental and theoretical research in photonics, notably high Q optical microcavities and their use in cavity quantum optomechanics and frequency metrology PUBLICATIONS AND OFTEN CITED METRICS*: >70 Publications in peer reviewed journals Researcher Google Profile: http://scholar.google.ch/citations?user=PRCbG2kAAAAJ&hl=en h-Index 54 (Google scholar H: 64, >25,000 citations) Thomson Reuters/Claravite List of Highly Cited Researchers (2014,2015,2016,2017) careful in its use: https://www.aps.org/publications/apsnews/201411/backpage.cfm KEY PUBLICATIONS AND REVIEWS: A. Ghadimi, et al. Elastic strain engineering for ultra high Q nanomechanical oscillators Science, (2018) Trocha, et al. Ultrafast distance measurements using soliton microresonator frequency combs Science, Vol. 359 (2018) [joint work with C. Koos] Pablo-Marin et al. Microresonator-based solitons for massively parallel coherent optical communications Nature (2017) [joint work with C. Koos] V. Brasch, et al. Photonic chip-based optical frequency comb using soliton Cherenkov radiation. Science, vol. 351, num. 6271 (2015) Aspelmeyer, M., Kippenberg, T. J. & Marquardt, F. Cavity optomechanics. Reviews of Modern Physics 86, 1391-1452, (2014) Wilson, D. J. et al. Measurement and control of a mechanical oscillator at its thermal decoherence rate. Nature (2014). Verhagen, E., Deleglise, S., Weis, S., Schliesser, A. & Kippenberg, T. J. Quantum-coherent coupling of a mechanical oscillator to an optical cavity mode. Nature 482, 63-67 (2012). Kippenberg, T. J., Holzwarth, R. & Diddams, S. A. Microresonator-based optical frequency combs. Science 332, 555-559, (2011). Weis, S. et al. Optomechanically induced transparency. Science 330, 1520-1523 (2010). Kippenberg, T. J. & Vahala, K. J. Cavity optomechanics: back-action at the mesoscale. Science 321, 1172-1176, (2008). Del'Haye, P. et al. Optical frequency comb generation from a monolithic microresonator. Nature (2007) Schliesser, A., DelHaye, P., Nooshi, N., Vahala, K. & Kippenberg, T. Radiation Pressure Cooling of a Micromechanical Oscillator Using Dynamical Backaction. Physical Review Letters 97, (2006).

Didier Bouvet

Paul Muralt

Paul Muralt received a diploma in experimental physics in 1978 at the Swiss Federal Institute of Technology ETH in Zurich. He accomplished his Ph.D. thesis in the field of commensurate-incommensurate phase transitions at the Solid State Laboratory of ETH. In the years 1984 and 1985 he held a post doctoral position at the IBM Research Laboratory in Zurich where he pioneered the application of scanning tunneling microscopy to surface potential imaging. In 1987, after a stay at the Free University of Berlin, he joined the Balzers group in Liechtenstein. He specialized in sputter deposition techniques, and managed since 1991 a department for development and applications of Physical Vapor Deposition and PECVD processes. In 1993, he joined the Ceramics Laboratory of EPFL in Lausanne. AS group leader for thin films and MEMS devices, he specialized in piezoelectric and pyroelectric MEMS with mostly Pb(Zr,Ti)O3 and AlN thin film. His research interests are in thin film growth in general, and more specifically in property assessment of small ferroelectric structures, in integration issues of ferroelectric and other polar materials, property-microstructure relationships, and applications of polar materials in semiconductor and micro-electro-mechanical devices. More recently he extended his interests to oxide thin films of ionic conductors. The focus in piezoelectric thin films was directed towards AlN-ScN alloys. He gives lectures in thin film processing, micro fabrication, and surface analysis. He authored or co-authored more than 230 scientific articles. He became Fellow of IEEE in 2013. In 2005, he received an outstanding achievement award at the International Symposium on Integrated Ferroelectrics (ISIF), and in 2016 the B.C. Sawyer Memorial award. Chairman of the International Workshops on Piezoelectric MEMS(http://www.piezomems2011.org/)

Terunobu Akiyama

Michael David Canonica