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Semiconductor fabrication plant

Publications associées (357)

Printed array of thin-dielectric metal-oxide-metal (MOM) tunneling diodes

A large area array of metal-oxide-metal (MOM) tunneling diodes with an ultrathin dielectric (∼3.6 nm aluminum oxide) have been fabricated via a transfer-printing process. The MOM diodes exhibit an excellent tunneling behavior that is suitable for rectifyin ...

American Institute of Physics2011

Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors

Olivier Martin, Thomas Gerd Siegfried

We report a high-throughput method for the fabrication of metallic nanogap arrays with high-accuracy over large areas. This method, based on shadow evaporation and interference lithography, achieves sub-10 nm gap sizes with a high accuracy of 61.5 nm. Cont ...

American Institute of Physics2011

Nanoengineered Silicon: Technology and Applications

Sandro Carrara, Lucia Baldi Unser

Silicon has been, and continues to be, the material support of integrated circuit (IC) technology-the enabling tool of one of the most impressive technological, industrial and social revolution of mankind. Silicon (both in monocrystalline and polycrystalli ...

2011

Review on the EFDA programme on tungsten materials technology and science

Nadine Baluc, Robin Schäublin, Lyubomira Veleva, Daniela Rupp

All the recent DEMO design studies for helium cooled divertors utilize tungsten materials and alloys, mainly due to their high temperature strength, good thermal conductivity, low erosion, and comparably low activation under neutron irradiation. The long-t ...

Elsevier2011

In-IC Strategies for 3D Devices in Bulk Silicon

Matthieu Bopp

The increase of components density in advanced microelectronics is practically dictated by the device size and the achievable pitch between the devices. Scaling down dimensions of devices and progress in the circuit design allowed following Moore's law dur ...

EPFL2011

A novel approach to dielectrophoresis using carbon electrodes

Philippe Renaud, Rodrigo Martinez Duarte

Carbon-electrode dielectrophoresis (carbon-DEP) is demonstrated here as an alternative to more traditional DEP techniques. Carbon-DEP combines advantages of metal-electrode and insulator-based DEP by using low-cost fabrication techniques and low voltages f ...

Wiley-Blackwell2011

Multilayer Dielectric Elastomer Actuators with Ion Implanted Electrodes

Herbert Shea, Muhamed Niklaus, Samin Akbari

We present the design, fabrication process and characterization of multilayer miniaturized polydimethylsiloxane (PDMS)-based dielectric elastomer diaphragm actuators. The conductive stretchable electrodes are obtained by lowenergy metal ion implantation. T ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011

FinFET for high sensitivity ion and biological sensing applications

Mihai Adrian Ionescu, Livio Lattanzio, Sara Rigante

A double-gate (DG) fin field effect transistor (FinFET) is discussed as new label-free ion and biological sensor. Simulations as function of channel doping, geometrical dimensions, operation point and materials investigated the device response to an extern ...

2011

Integrated SMD pressure/flow/temperature multisensor for compressed air in LTCC technology: Thermal flow and temperature sensing

Peter Ryser, Thomas Maeder, Yannick Sébastien Fournier, Nicolas Craquelin, Jean-Bastien Coma

In this work, we present and analyse the flow-sensing part of a recently-developed multisensor in LTCC (low- temperature co-fired ceramic) technology; this device integrates flow / pressure / temperature sensing and is designed for diagnostics monitoring o ...

Elsevier2011

Organic Thin-Film Transistors and Circuits Fabricated by Stencil Lithography on Full-Wafer Flexible Substrates

Nenad Cvetkovic

Electronic devices based on organic semiconductors, such as field-effect transistors (OTFTs) and organic diodes have attracted significant interest as possible inexpensive and flexible alternatives to inorganic devices. Despite considerable improvement in ...

EPFL2011

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