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This thesis deals with the development of microfabrication technologies based on photoplastic structuring by lithographic and molding techniques. These technologies, combined with an original releasing method, allow for the simple fabrication of pseudo thr ...
The present paper describes a new method for manufg. a nanostructured porous layer of a semiconductor material on a conducting plastic substrate for use in an electrochem. or photoelectrochem. cell. The method involves the deposition of a layer of semicond ...
The fabrication, characterization and application of polyimide-based flexible microelectrodes for recording from and stimulation of biological tissue are described. The planar electrodes consist of a polyimide-platinum-polyimide sandwich structure with a t ...
This paper suggests a new fabrication method for surface micromachining based on porous silicon formation followed by electropolishing. in contrast to its known use as a sacrificial layer, in this work, porous silicon will be employed as constitutive mater ...
We report on the investigation of refractive microlens arrays with diffractive grating surfaces in the context of a microspectrometer array system. The elements fabricated combine the fairly large dimensions of the refractive microlens (990-μm diam, 60-μm ...
This paper describes a microgripper used for the micro-assembly of an artificial scaffold for tissue engineering. The porous sponge-like scaffold is a three dimensional construct built by tiny unit parts of biodegradable polymer. This application requires ...
This paper reviews deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric proper ...
Chalcogenide glass optical fibers were fabricated into functional apertured probes for near field scanning infrared microscopy. Probe fiber tips were chemically etched and aluminum coated for the purpose of simultaneously collecting near field shear force ...
This paper reviews deposition, integration. and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are ...
The prevailing prodn. method for dye-sensitized solar cells is based on the screen-printing technique. To find an alternative method, allowing very high throughput, we have looked into the possibility of developing a continuous prodn. process. A prerequisi ...