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Publications associées (239)

TFA pixel sensor technology for vertex detectors

Arvind Shah, Sylvain Dunand, Matthieu Despeisse

Pixel microvertex detectors at the SLHC and a future linear collider face very challenging issues: extreme radiation hardness, cooling design, interconnections density and fabrication cost. As an alternative approach we present a novel pixel detector based ...

2006

DRIE based novel technique for AFM probes fabrication

Luis Guillermo Villanueva Torrijo

We report on the fabrication of atomic force microscopy (AFM) probes using a novel technology that performs every machining step by means of one single deep reactive ion etching (DRIE) equipment. Specific etching conditions are optimized in order to define ...

2006

An Orthogonal Fluxgate-Type Magnetic Microsensor

Radivoje Popovic, Pavel Kejik, Franck Vincent, Ozge Zorlu

In this paper, we present a new microfabricated orthogonal fluxgate sensor structure. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated permalloy layer and has planar pick-up coils for signal detection. The use of ...

2006

Tubular La0.7Ca0.3Fe0.85Co0.15O3-delta Perovskite Membranes, Part I: Preparation and Properties

Jan Van Herle, Stefan Diethelm

Dense tubular self-supporting La0.7Ca0.3Fe0.85 Co0.15O3-δperovskite membranes were prepared by thermoplastic extrusion. The rheological behavior of the ceramic mixture was studied. Non-deformed tubes o ...

2006

Paraffin-PDMS composite thermo microactuator with large vertical displacement capability

Nico de Rooij, Danick Briand, Herbert Shea

We have micromachined and tested the first paraffinPDMS composite thermal microactuator having multi shot large vertical displacement capabilities ( 160 um for 1 mm diameter device). A solid to liquid phase change of trapped paraffin into the PDMS is used ...

2006

Processing of homogeneous ceramic/polymer blends for bioresorbable composites

Pierre-Etienne Bourban

Three methods to mix ceramic fillers, hydroxyapatite or β-tricalcium phosphate, with a polymer matrix, a poly l-lactic acid, are investigated as a first step prior to supercritical foaming to prepare porous composite structures for biomedical applications. ...

2006

Fabrication of AFM Probes: Tip, Cantilever and Chip micromachining by DRIE

Luis Guillermo Villanueva Torrijo

2005

EVAPORATION THROUGH SHADOW MASKS ON UNCONVENTIONAL SUBSTRATES

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Chantal Imboden

While standard photolithography methods have proven themselves in semiconductor applications, they have fundamental limitations when considered for the fabrication of advanced micro/nanosystems (MEMS/NEMS). MEMS and NEMS often use “soft” materials such as ...

2005

Coherent microradiology directly observes a critical cathode-anode distance effect in localized electrochemical deposition

Giorgio Margaritondo

Localized electrochemical deposition (LECD) is an emerging technology for inexpensive and effective fabrication of high-aspect-ratio microstructure of diverse materials. Microradiology with coherent X-rays enabled study of this process in real-time. This l ...

2004

Fiber Orientation in Multilayer Tubes Processed by a Conical Extruder

A new extruder design has been developed for the coextrusion of two-layer annular sections. The extruder consists of a conical stator-rotor-stator assembly, which performs extrusion from each side of the rotor. Flow within this assembly is fully three-dime ...

2004

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