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The optical emission spectroscopy technique is used to characterise the temporal behaviour of a pure silane plasma in the first 90 s after ignition of a static closed-chamber very high frequency glow discharge. Special interest is drawn to the formation of ...
An electrostatic charge can be left on an insulating substrate after RF plasma processing, even though the plasma and surfaces are globally neutral. High voltages and breakdown can then occur when the substrate is manipulated. If the substrate is not a per ...
A characterization of the H-mode in Tokamak de Varennes (TdeV) is presented, combining results obtained from spectroscopic measurements with observations of global plasma parameters. Controlled L- and H-modes are obtained by applying an external bias on th ...
The highest volume averaged beta values beta (t) of 2.2% at B-t = 0.75 T (gas puff) and 2.4% at D-t = 1.3 T (pellet) in helical devices have been achieved in LHD. The beta (t) dependence of MHD activities has been investigated in NBI plasmas. The n/m = 1/2 ...
AIN is a material used in a wide variety of applications such as electroacoustic devices, blue diodes, IR windows, thermal conductors, metal-insulator-semiconductor structures, integrated circuit packaging, etc. In this work thin piezoelectric AIN polycrys ...
The invention relates to a device for producing a gas mixture consisting of HMDSO and oxygen, whereby process gas is produced. In order to be able to continuously produce a large volume of process gas using such a device and to be able to withdraw the same ...
Recent progress towards obtaining high density and high confinement in JET as required for the ITER reference scenario at Q = 10 is summarized. Plasmas with simultaneous confinement H-98(y.2) = 1 and densities up to n/n(Gw) similar to 1 are now routinely o ...
The invention relates to a device for producing a gas mixture consisting of HMDSO and oxygen, whereby process gas is produced. In order to be able to continuously produce a large volume of process gas using such a device and to be able to withdraw the same ...
This paper addresses the problem of time-dependent dielectric breakdown of Pb(Zr,Ti)O-3 (PZT) thin films. It is shown by using constant-current breakdown measurements, that for PZT film capacitors with Pt and SrRuO3 (SRO) electrodes the breakdown onset is ...
The formation of sub-micron sized particulates has been studied in a low pressure (0.1 mbar) radio-frequency (13.56 MHz) capacitively coupled plasma discharge. Particles are studied in situ by infrared absorption spectroscopy, laser illumination and Cavity ...
