Concept

Microcontact printing

Publications associées (44)

Ties between Microsystems Technology and Nano-Engineering

Jürgen Brugger, Christian Santschi, Marc Antonius Friedrich van den Boogaart, Schahrazede-Lila Mouaziz, Johannes Steen, Nao Takano, Maïté Volatier

Our research is centered on the engineering of structures at the mesoscopic length scale. Patterns between the micrometer and nanometer bridge molecules and biological cells to microelectronics and microsystems, and further to the macroworld, and vice vers ...

2004

High-throughput surface patterning with wafer-sized stencils fabricated by a DUV/MEMS process

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

The endeavour to develop nanodevices demands for patterning methods in the nanometer scale. The continuous improvement in lithography methods based on deep UV (DUV), X-ray, or electron beam exposure allow for further progress in integrated circuit hardware ...

2004

Surface plasmon illumination scheme for contact lithography beyond the diffraction limit

Olivier Martin

A novel local illumination scheme for optical lithography is proposed. It is based on the excitation of a surface plasmon on a metal film incorporated into a polymer light coupling mask for contact lithography. The electromagnetic field associated with the ...

2003

All-photoplastic microstencil with self-alignment for multiple layer shadow-mask patterning

Jürgen Brugger

A rapid and simple method to fabricate tiny shadow-masks and their use in multi-layer surface patterning with in situ micromechanical alignment is presented. Instead of using silicon micromachining with through-wafer etching to define the thin membrane wit ...

2003

Rectangular channels for lab-on-a-chip applications

Nico de Rooij

We investigated the application of two technologies for the fabrication of rectangular microchannels with reasonable path lengths for UV detection in UV transparent materials. The first approach uses inductively coupled plasma (ICP)-reactive ion etching (R ...

2003

Size-dependent free solution DNA electrophoresis in structured microfluidic systems

Jürgen Brugger

A new concept based on microstructuring techniques is presented to achieve size-dependent electrophoretic migration of DNA in free solution. Topographically structured microfluidic channels with periodical cavities in the range of the radius of gyration of ...

2003

Unconventional micro/nano patterning method combining shadow-mask pattern and micro-contact printing

Jürgen Brugger

not available ...

2002

A self-assembled monolayer-assisted surface microfabrication and release technique

Jürgen Brugger

This paper describes a method of thin film and MEMS processing which uses self-assembled monolayers as ultra-thin organic surface coating to enable a simple removal of microfabricated devices off the surface without wet chemical etching. A 1.5-nm thick sel ...

2001

Contrast mechanisms in high-resolution contact lithography: A comparative study

Olivier Martin

We compare three different approaches to high-resolution contact lithography with special emphasis on contrast mechanisms for subwavelength structures. Masks with protruding metal absorbers, masks with absorbers embedded in the transparent background, and ...

Elsevier2001

Mechanisms of Pb(Zr0.53Ti0.47)O-3 thin film etching with ECR/RF reactor

Nava Setter, Paul Muralt, Enrico Colla, Andreas Seifert, Nicolas Ledermann

Ferroelectric capacitive devices for memory and MEMS applications require patterned ferroelectric thin films with high anisotropic etched features. In this paper, physical and chemical parameters during etching of Pb(Zr0.53Ti0.47)O-3 (PZT) by a dual freque ...

2000

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